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Agilent N9201A Array Structure Parametric Test Option
Technical Overview
Introduction
The decreasing size of features on integrated circuits (45 nm and smaller) is driving the need for new parametric test capabilities. These capabilities must accommodate the advanced test structures developed for fast yield ramp up in process integration as well as process monitoring in semiconductor manufacturing. High-throughput measurement of highvolume parametric data is required to shorten the time for ramping up the process yield. This is accomplished by statistically analyzing and correcting the cause of wide range of process performance variations across a 300 mm wafer. Advanced test structures, addressable array test structures that contain address decoder circuitry, and a large number of test array elements www..com with fewer probing pads and silicon area have been developed by major semiconductor manufacturers for this purpose. The Agilent N9201A Parametric Test Option offers high throughput parametric measurement capability for a variety of addressable array test structures (e.g. passive array, active array and clocked latched active array) with synchronized mixed operation of DC SMUs and digital outputs. Digital outputs (parallel, serial, or clock signals) are used for the address decoder that is built into addressable array test structures. This allows the selection of the specific array element to be measured. DC SMUs measure the DC voltage and current parameters of selected array elements. The DC power source is used for applying the power supply voltage (Vdd) to the address decoder logic circuitry that is built-in the addressable array test structures. The N9201A is able to provide a maximum of 48 signal lines using the extended path ports of the 4070/4080 test head. This can be any combination of available SMUs, digital outputs, and DC power source outputs. The signals pass through the 4070/4080 test head down to the probe card. The N9201A is controlled by SPECS (Semiconductor Process Evaluation Core Software), a test shell environment for the 4070 Series and 4080 Series. The N9201A can be provided as an upgrade for existing 4070 Series and 4080 Series users.
Measurement functions
DC current, DC voltage, and digital output DC measurement Spot and sweep Measurement unit:* High speed medium power SMU (MPSMU); 8 SMU minimum configuration; SMUs may be added in increments of one up to a maximum of 40 SMUs
*Note: High Speed MPSMU specification is specified at the connectors of the equipment's front panel
Range of operation: -42 V to 42 V; -200 mA to 200 mA Minimum resolution: 100 V; 5 pA Maximum voltage between common and ground: 42 V Ground unit (GNDU) specification Output voltage: 0 V 100 V Maximum sink current: 0.5 A Output terminal/connection: Triaxial connector, Kelvin (remote sensing)
Voltage range, resolution and accuracy
Voltage range 2 V 20 V 40 V 100 V
1
Force resolution 100 V 1 mV 2 mV 5 mV
Measure resolution 100 V 1 mV 2 mV 5 mV
Force accuracy 1 (0.03% (0.03% (0.03% (0.04% + 900 V) + 4 mV) + 7 mV) + 15 mV)
Measure accuracy 2 (0.03% (0.03% (0.03% (0.03% + 700 V) + 4 mV) + 8 mV) + 20 mV)
Maximum current 200 mA 200 mA
2 3
(% of output/measurement value + offset voltage) 2 200 mA (Vout 20 V), 50 mA (20 V Current range, resolution and accuracy
Current range 100 nA 1 A 10 A 100 A 1 mA 10 mA 100 mA 200 mA
1 2 3
Force resolution 5 pA 50 pA 500 p pA 5 nA 50 nA 500 nA 5 A 10 A
Measure resolution 5 pA 50 pA 500 pA 5 nA 50 nA 500 nA 5 A 10 A
Force accuracy 1 (0.12% + 50 pA + 200 fA x Vo) (0.12% + 400 pA + 2 pA x Vo) (0.12% + 5 nA + 20 pA x Vo) (0.12% + 40 nA + 200 pA x Vo) (0.12% + 500 nA + 2 nA x Vo) (0.12% + 4 A + 20 nA x Vo) (0.12% + 50 A + 200 nA x Vo) (0.12% +100 A + 400 nA x Vo)
Measure accuracy 2 (0.1% + 30 pA + 200 fA x Vo) (0.1% + 200 pA + 2 pA x Vo) (0.1% + 3 nA + 20 pA x Vo) (0.1% + 20 nA + 200 pA x Vo) (0.1% + 300 nA + 2 nA x Vo) (0.1% + 2 A + 20 nA x Vo) (0.1% + 30 A + 200 nA x Vo) (0.1% + 60 A + 400 nA x Vo)
Maximum voltage 42 V 42 V 42 V 42 V 42 V 42 V
2 3
(% of output/measurement value + offset current A (fixed part determined by the output/measurement range + the proportional part that is multiplied by Vo)) 42 V (Io 20 mA), 40 V (20 mA Digital output
Digital output characteristics: 16 digital output lines maximum when the N9201A has 8 or less SMUs; 32 digital output lines maximum when the N9201A has more than 8 SMUs www..com Output voltage: High voltage: 0.3 V to 8.0 V Low voltage: 0.0 V Maximum output current: 64 mA Minimum state transition time: 20 s
DC power source**
1 channel and GND Output rating: 0.03 V to + 10.25 V Programming accuracy: Voltage: 0.1% 20 mV Current limit: 0.15% 20 mA
**Note: DC power source specification is specified at the connectors of the equipment's front panel
2
General specifications
Accuracy is specified at Temperature: 23C 5C Humidity: 5% to 70% RH Warm up time: at least 40 minutes. Self-calibration: Within one hour after calibration Integration time: Medium or long Operation and storage Operating temperature range: 5C to 30C Operating humidity range: 5% to 70% (noncondensing) Storage temperature -20C to 50C (< 80% RH, noncondensing) Power requirements Allowable voltage range at maximum current: 100 Vac - 120 Vac @ 20 A 200 Vac - 240 Vac @10 A Regulatory and standards compliance EMC: EMC Directive 89/336/EEC, 93/68/EEC IEC/EN61326-1 ICES-001 AS/NZS 2064.1 Safety: Low voltage directive 73/23/EEC, 93/68/EEC IEC/EN61010-1 CSA C22.2 No. 61010-1 Certification marking: CW, c CSA us, C-tick, ICES/NMB-001 Dimensions System cabinet: 600 mm (W) by 1050 mm (D) by 1818 mm (H) Weight System cabinet: Approximately 360 kg (including 40 SMUs, 32 digital outputs, 1 DC power source, and required cables)
Recommended probers and probe cards*
Probers: * ACCRETECH UF3000 * TEL P12XL Probe cards: * JEM (Japan electronic materials Co.) * MJC (Micronics Japan Co.) * K&S (Kulicke & Soffa Industries Inc.) * FormFactor
* Please contact your local sales representative regarding the latest information on recommended probers and probe cards.
N9201A-to-4070/4080 Series connection capabilities
N9201A measurement hardware resources
1 2 3 4 . . . . 39 40 1 2 3 . . . 31 32 1 2 3 4 5 6 . . . . . . . . . . . . . 45 46 47 48 1 2 3 4 5 . . . . . . . . . . . . 43 44 45 46 47 48 SMU1 SMU3 SMU5 SMU7 GNDU SMU2 SMU4 SMU6 SMU8
Maximum 48 extended ports
SMUs
4070/4080 Series test head
Digital outputs
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DC power source
1 GND
48 DUT pins
3
Web Resources N9201A Web Site
Visit our N9201A web site for additional product information and literature.
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Revised: July 17, 2008
Product specifications and descriptions in this document subject to change without notice. (c) Agilent Technologies, Inc. 2007, 2008 Printed in USA, August 8, 2008 5989-5747EN
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